Optical Defect Visualizer System
Ultrafine Defect Visualizing Macro Inspection System .... Micro-MAX VMX-3100, which is an improved version of 2100 in detecting .... kind of plane mirror-finished substrate such as silicon wafer, ... servo patterns across the entire mold or disk surface. .... VMI-2500F detects microfine defects and particles on the ID Edges.
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t-kihan's website is t-kihan.com