photronics
Haze growth on reticles – what's the RigHT thing to do? - Photronics
was not to grow haze on the reticle during its lifetime in various wafer fabs ... “ Along with almost everything else in semiconductor lithography, photomask defect detection and elimination are ... Haze detection usually occurs during mask inspection or, in the ... fall on particles that may print pellicle damage or reticle damage.
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