Advanced Lithography Michael Dickey, Michael Stewart, Grant Willson
mechanical systems (MEMS), photonic devices, and micro-fluidic devices, but by far the most pervasive and economically significant use of lithography is found in the ... semiconductor performance over the past fifty years can largely be attributed to ... 2 Scanning electron micrograph of 80 nm photoresist lines on a substrate.
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nfc's website is nfc.umn.edu