Wafer Inspection as Alternative Approach to Mask Defect Qualification
inspectability of advanced mask patterns (including OPC and SRAF's) ... Wafer inspection is an alternative approach to the mask defect detection with a ... coordinate systems together with a multi-die layout of the exposure field, and in ... mask defects of different nature like pattern defects, particles, phase defects and so on ...
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amtc-dresden's website is amtc-dresden.de